Foundations of MEMS, 2/e Chang Liu

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Kindle Edition

560 pages


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Foundations of MEMS, 2/e  by  Chang Liu

Foundations of MEMS, 2/e by Chang Liu
| Kindle Edition | PDF, EPUB, FB2, DjVu, AUDIO, mp3, RTF | 560 pages | ISBN: | 10.22 Mb

For courses in Micro-Electro-Mechanical Systems (MEMS) taken byadvanced undergraduate students, beginning graduate students, andprofessionals.Foundations of MEMS is an entry-level text designed tosystematically teach the specifics of MEMS to anMoreFor courses in Micro-Electro-Mechanical Systems (MEMS) taken byadvanced undergraduate students, beginning graduate students, andprofessionals.Foundations of MEMS is an entry-level text designed tosystematically teach the specifics of MEMS to an interdisciplinaryaudience.

Liu discusses designs, materials, and fabrication issuesrelated to the MEMS field by employing concepts from both theelectrical and mechanical engineering domains and by incorporatingevolving microfabrication technology — all in atime-efficient and methodical manner. A wealth of examples andproblems solidify students’ understanding of abstractconcepts and provide ample opportunities for practicing criticalthinking.



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